Fluidic channel integrated resonators via traditional microfabrication and unconventional fabrication
  • Jungchul Lee Ph.D
  • SLS Colloquia / May 30th 04:00pm / BLDG.110 Room N104

Suspended microchannel resonators1 are one of the most promising microfluidic MEMS devices that measures mass, density, and volume of micro-/nanoparticles and single cells by monitoring change in the resonance frequency. While they offer outstanding performance metrics, fabrication is still extremely complicated thus only a few research groups can make them so far. An efficient and simple fabrication process can be realized by the silicon-on-nothing (SON)2 process that has previously been used to improve the dielectric barrier strength of miniaturized semiconductor devices and fabricate MEMS devices such as pressure sensors and biological patch clamps. In the first part of talk, a simple and cost-effective fabrication approach that utilizes the SON process to make hollow microfluidic resonators3 will be presented. For further simplification and researchers who have no or limited access to standard microfabrication facilities housed in a cleanroom, a smart solution employing commercially available capillaries4 rather than flat wafers will be presented in the second part of talk.